agenda

Tool-Automation in a 200mm-Waferfab - from Project to Production

• Fully automated carrier and wafer handling
• Fully automated production bay
• Expectations, experience and lessons learned

• Selection criterias for integration software
• Step by Step integration & automation with visual workflows
• Know how transfer & training, lessons learned

A success factor for product quality in semiconductor production is to continuously monitor the process performance of process equipment. The presentation illustrates the Infineon test wafer concept, focusing on the newly integrated TestWaferKitter as a sorter cluster for composing test wafer lots.

Foundry transformation of Fab 1 Dresden required a totally overhauled approach to Reticle Management, both in terms of logistics and data management, and supporting system integration with factory systems, business applications, supplier and customer interfaces. The combination of external products and worldwide internal expertise rapidly provided a state-of-art solution.

Scrum is an iterative, incremental project management framework, which was applied towards the design, development, and rollout of a large equipment integration project at the Hewlett Packard semiconductor facility in Corvallis. The presentation will share approach, benefits, and pitfalls of this software development methodology.

Beside conventional inorganic LEDs, Organic Light Emitting Diodes (OLED) are considered as the second solid-state-lighting technology for new flat, large-area, and efficient lighting solutions. OLED lighting on glass substrates has been successfully started the market entry.
The production of highly efficient OLED on larger area is still a challenge. Beside an overview on the worldwide activities, latest results of the COMEDD Gen2 manufacturing system for OLED lighting, as well as roll-to-roll line for OLED lighting will be briefly introduced.

Successful experiments improve production processes and increase the quality and efficiency of solar cells.
The Development Execution System (DES) provides enhanced and adapted functions especially for R&D users in laboratories or testing facilities.

Objective of current research activities are new Hybrid-Robotic-solutions.

Automation concepts can only become successful if clean room requirements are in focus of all design and implementation steps. The presentation gives an overview of relevant experiences and suggestions.

The continous increase of throughput requirements for fabs need a scalable & performant IT environment. Load test with emulators against the MES or MCS will help to understand IT bottlenecks upfront. This presentation will be based on a project report of an MCS enhancement project performed at Spansion 200mm Fab in Austin, TX.

Experiment Management in highly automated semiconductor manufacturing is the challenge; seamless integration of Experiments into Automation and MES-World the objective. - Learn what Infineon and SYSTEMA have accomplished joining their efforts to develop a highly efficient solution for Experiment Execution.